(American Vacuum Society, 2014) Domínguez Fernández, Sagrario; Cornago Santos, Ignacio; Bravo Larrea, Javier; Pérez Conde, Jesús; Choi, Hyungryul J.; Kim, Jeong-Gil; Barbastathis, George; Física; Fisika; Gobierno de Navarra / Nafarroako Gobernua: 1858/2012
In this work, the authors present a novel fabrication process to create periodic nanostructures with aspect ratio as high as 9.6. These nanostructures reduce spectral reflectance of silicon to less than 4% over the broad wavelength region from 200 to 2000nm. At the visible range of the spectrum, from 200 to 650 nm, reflectivity is reduced to less than 0.1%. The aspect ratio and reflectance performance that the authors achieved have never been reported before for ordered tapered nanostructures, to our knowledge.