(2021) Vitoria Pascual, Ignacio; Armas, Dayron; Coronel Camones, Carlos Manuel; Ozcariz Celaya, Aritz; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Institute of Smart Cities - ISC; Ingeniaritza Elektrikoa, Elektronikoaren eta Telekomunikazio Ingeniaritzaren
A micro sized interdigital capacitor has been proposed for the detection of relative humidity. The photolithography technique enables the fabrication of fingers with a size of 10x500 um. A thin film of agarose functionalizes the sensor for humidity sensing, which improves its performance by 155 times, obtaining a sensitivity of 32.98 pF/%RH.