(IEEE, 2023) Armas, Dayron; Zubiate Orzanco, Pablo; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Institute of Smart Cities - ISC; Ingeniaritza Elektrikoa, Elektronikoaren eta Telekomunikazio Ingeniaritzaren
This letter presents the fabrication and characterization of an ammonia (NH 3) gas optical sensor based on lossy mode resonances (LMRs). A chromium (III) oxide (Cr 2 O 3) thin film deposited onto a planar waveguide was used as LMR supporting coating. The obtained LMR shows a maximum attenuation wavelength or resonance wavelength centered at 673 nm. The optical properties of the coating can be modified as a function of the presence and concentration of NH 3 in the external medium. Consequently, the refractive index of the Cr 2 O 3 thin film will change, producing a red-shift of the resonance wavelength. Obtained devices were tested for different concentrations of NH 3 as well as repetitive cycles. Concentrations as low as 10 ppbv of NH 3 were detected at room temperature. Machine learning regression models were used to mitigate the cross-sensitivity of the device under temperature and humidity fluctuations.
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