(Elsevier, 2025-01-16) González Salgueiro, Lázaro José; Del Villar, Ignacio; Corres Sanz, Jesús María; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Ingeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio Ingeniaritza; Institute of Smart Cities - ISC; Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa
This study presents a novel sensor design utilizing a long-period fiber grating (LPFG) deposited with a TiO2 nanocoating via atomic layer deposition. The study combines theoretical simulations and experimental validation to optimize the grating period and modulation index to operate in the mode transition with a quasi-lossy mode resonance (LMR) behavior, i.e., the LPFG attenuation bands shift similarly to LMRs. This enables the achievement of a remarkable sensitivity of 78 nm/nm, allowing for the detection of sub-angstrom variations in film thickness, which is critical for applications in semiconductor manufacturing. Our setup facilitates continuous monitoring of the transmission spectrum, enabling real-time adjustments during deposition to maximize sensitivity. As proof of concept for the applicability of the sensor as a refractive index sensor, we demonstrated exceptional sensitivity for nitrogen detection, achieving around 10,000 nm/RIU, with a figure of merit of 200. This marks one the highest sensitivities reported for optical fiber gas sensors and suggests this technology could revolutionize the field duet to its simplicity in terms of sensor design.
