(IEEE, 2025-07-02) Correa Fernández, Ángel; Gallego Martínez, Elieser Ernesto; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Ingeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio Ingeniaritza; Institute of Smart Cities - ISC; Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa
This letter describes the fabrication of sensor devices based on lossy mode resonance (LMR) and hyperbolic mode resonance (HMR) using for the first time as generating materials of the optical resonances both, yttrium iron garnet (Y3Fe5O12) and strontium titanate (SrTiO3) with a film thickness of 739.2 and 158.7 nm for Y3Fe5O12 (YIG) and SrTiO3, respectively. First-order resonances were observed at the visible region of the electromagnetic spectrum for both materials, LMR and HMR phenomena. RF sputtering deposition was used to fabricate metal oxide thin films on coverslips in a planar waveguide configuration, the Au metallic thin films were deposited by pulsed dc sputtering in a magnetron system from Moorfield. All devices were characterized under different surrounding medium refractive index. Sensitivities achieved values of 5862 and 5865 nm/RIU (refractive index unit) for HMR versions of Y3Fe5O12 and SrTiO3r, respectively. In addition, the response of the sensors to relative humidity and different ethanol concentrations was evaluated. The best results correspond to the Y3Fe3O3-based sensor, with a sensitivity of 0.2 nm/ppm and a limit of detection (LOD) of 183 ppm for ethanol, and 64 nm/%RH for RH, with an LOD of 2.23%RH, and because its resonance does not vanish unlike SrTiO3.
