Matías Maestro, Ignacio

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Matías Maestro

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Ignacio

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Ingeniería Eléctrica, Electrónica y de Comunicación

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ISC. Institute of Smart Cities

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  • PublicationOpen Access
    HMR-based optical gas detection with CuO and ZnO coatings
    (IEEE, 2025-07-02) Gallego Martínez, Elieser Ernesto; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Ingeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio Ingeniaritza; Institute of Smart Cities - ISC; Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa
    This work presents the fabrication of hyperbolic mode resonance-based optical sensors by means of sputtered copper oxide (CuO) and zinc oxide (ZnO), and the study of their performance for gas sensing purposes. Two sensors were fabricated in a planar waveguide configuration with an intermediate gold thin film, and resonances were observed in the visible region of the electromagnetic spectrum. Both materials were analyzed with X-ray diffraction techniques, and their response was characterized by different concentrations of a group of gases comprised of nitric oxide, acetylene (C2H2), ethanol, carbon dioxide, and relative humidity. The best performance corresponds to the CuO sensor for C2H2 gas, presenting a sensitivity of 1.11 nm/parts per million (ppm) and a limit of detection of 12.6 ppb, with response and recovery times of 70 and 68 s, respectively. ZnO-based sensors allowed for a comprehensive study of ethanol in a range of thousands of ppm, while CuO-based sensors showed exceptional sensitivity for most gases in the range of a few ppm. All measurements were performed at room temperature.
  • PublicationOpen Access
    Lossy mode resonance and hyperbolic mode resonance-based optical sensors by means of Y3Fe5O12 and SrTiO3 films deposition on planar substrates
    (IEEE, 2025-07-02) Correa Fernández, Ángel; Gallego Martínez, Elieser Ernesto; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Ingeniaritza Elektrikoa, Elektronikoa eta Telekomunikazio Ingeniaritza; Institute of Smart Cities - ISC; Universidad Pública de Navarra / Nafarroako Unibertsitate Publikoa
    This letter describes the fabrication of sensor devices based on lossy mode resonance (LMR) and hyperbolic mode resonance (HMR) using for the first time as generating materials of the optical resonances both, yttrium iron garnet (Y3Fe5O12) and strontium titanate (SrTiO3) with a film thickness of 739.2 and 158.7 nm for Y3Fe5O12 (YIG) and SrTiO3, respectively. First-order resonances were observed at the visible region of the electromagnetic spectrum for both materials, LMR and HMR phenomena. RF sputtering deposition was used to fabricate metal oxide thin films on coverslips in a planar waveguide configuration, the Au metallic thin films were deposited by pulsed dc sputtering in a magnetron system from Moorfield. All devices were characterized under different surrounding medium refractive index. Sensitivities achieved values of 5862 and 5865 nm/RIU (refractive index unit) for HMR versions of Y3Fe5O12 and SrTiO3r, respectively. In addition, the response of the sensors to relative humidity and different ethanol concentrations was evaluated. The best results correspond to the Y3Fe3O3-based sensor, with a sensitivity of 0.2 nm/ppm and a limit of detection (LOD) of 183 ppm for ethanol, and 64 nm/%RH for RH, with an LOD of 2.23%RH, and because its resonance does not vanish unlike SrTiO3.