SnO2-MOF-Fabry-Perot optical sensor for relative humidity measurements

In this paper, a new optical fiber sensor for relative humidity measurements is presented and characterized. The sensor is based on a SnO2 sputtering deposition on a microstructured optical fiber (MOF) low-finesse Fabry-Pérot (FP) sensing head. The feasibility of the device as a breathing sensor is also experimentally demonstrated. The interrogation of the sensing head is carried out by monitoring the Fast Fourier Transform phase variations of the FP interference frequency. This method substitutes the necessity of tracking the optical spectrum peaks or valleys, which can be a handicap when noise or multiple contributions are present: therefore, it is low-sensitive to noise and to artifacts signal amplitude. The sensor shows a linear behavior in a wide relative humidity range (20%–90% relative humidity) in which the sensitivity is 0.14 rad/%; the maximum observed instability is 0.007 rad, whereas the highest hysteresis is 5% RH. The cross correlation with temperature is also considered and a method to lower its influence is proposed. For human breathing measurement, the registered rising and recovery times are 370 ms and 380 ms respectively.