Vitoria Pascual, IgnacioArmas, DayronCoronel Camones, Carlos ManuelAlgarra González, ManuelRuiz Zamarreño, CarlosMatías Maestro, IgnacioMukhopadhyay, Subhas C.2023-05-312024-04-092023Vitoria, I., Armas, D., Coronel, C., Algarra, M., Zamarreño, C. R., Matias, I. R., Mukhopadhyay, S. C. (2023) Micro sized interdigital capacitor for gases detection based on graphene oxide coating. En Suryadevara, N. K., Krishanthi, B. G., Jayasundera, P., Roy, J. K., Mukhopadhyay S. C. (Eds.), Sensing Technology: proceedings of ICST 2022 (pp. 24-30). Springer978-3-031-29871-4https://academica-e.unavarra.es/handle/2454/45362A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10-1 pF/ % v/v for CO2 and R2=0.972 and 1.433·10-1 pF/ppb for NO.application/pdfeng© Springer Nature Publishing AGInterdigitalGas sensorGraphene oxidePhotolithographyinfo:eu-repo/semantics/conferenceObject2023-05-31info:eu-repo/semantics/openAccess