Micro sized interdigital capacitor for humidity detection based on agarose coating

Vitoria Pascual, IgnacioArmas, DayronCoronel Camones, Carlos ManuelOzcariz Celaya, AritzRuiz Zamarreño, CarlosMatías Maestro, Ignacio2022-08-162022-08-162021https://academica-e.unavarra.es/handle/2454/43800A micro sized interdigital capacitor has been proposed for the detection of relative humidity. The photolithography technique enables the fabrication of fingers with a size of 10x500 um. A thin film of agarose functionalizes the sensor for humidity sensing, which improves its performance by 155 times, obtaining a sensitivity of 32.98 pF/%RH.application/pdfengCreative Commons Atribución-NoComercial-SinDerivadas 4.0 Internacional (CC BY-NC-ND 4.0)InterdigitalCapacitive sensorAgaroseRelative humidityMicro sized interdigital capacitor for humidity detection based on agarose coatinginfo:eu-repo/semantics/conferenceObjectinfo:eu-repo/semantics/openAccess