Del Villar, IgnacioRuiz Zamarreño, CarlosHernáez Sáenz de Zaitigui, MiguelSánchez Zábal, PedroArregui San Martín, Francisco JavierMatías Maestro, Ignacio2018-03-282018-03-2820140030-3992 (Print)1879-2545 (Electronic)10.1016/j.optlastec.2014.12.012https://academica-e.unavarra.es/handle/2454/28108Silicon wafers coated with IndiumTinOxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields.application/pdfeng© 2014 Elsevier B.V. The manuscript version is made available under the CC BY-NC-ND 4.0 license.Thin filmsOptical resonanceSensorsinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/openAccess