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dc.creatorDomínguez Fernández, Sagrarioes_ES
dc.creatorCornago Santos, Ignacioes_ES
dc.creatorBravo Larrea, Javieres_ES
dc.creatorPérez Conde, Jesúses_ES
dc.creatorChoi, Hyungryul J.es_ES
dc.creatorKim, Jeong-Giles_ES
dc.creatorBarbastathis, Georgees_ES
dc.date.accessioned2016-06-16T07:08:02Z
dc.date.available2016-06-16T07:08:02Z
dc.date.issued2014
dc.identifier.issn1071-1023
dc.identifier.urihttps://hdl.handle.net/2454/20888
dc.description.abstractIn this work, the authors present a novel fabrication process to create periodic nanostructures with aspect ratio as high as 9.6. These nanostructures reduce spectral reflectance of silicon to less than 4% over the broad wavelength region from 200 to 2000nm. At the visible range of the spectrum, from 200 to 650 nm, reflectivity is reduced to less than 0.1%. The aspect ratio and reflectance performance that the authors achieved have never been reported before for ordered tapered nanostructures, to our knowledge.en
dc.description.sponsorshipThis work was supported in part by Department of Innovation, Enterprise and Employment of Gobierno de Navarra research grant 1858/2012 [...]en
dc.format.mimetypeapplication/pdfen
dc.language.isoengen
dc.publisherAmerican Vacuum Societyen
dc.relation.ispartofJournal of Vacuum Science and Technology B, 32 (3), May/June 2014en
dc.rights© 2014 American Vacuum Societyen
dc.subjectNanostructuresen
dc.subjectAntireflectivityen
dc.subjectSiliconen
dc.titleSimple fabrication of ultrahigh aspect ratio nanostructures for enhanced antireflectivityen
dc.typeArtículo / Artikuluaes
dc.typeinfo:eu-repo/semantics/articleen
dc.contributor.departmentUniversidad Pública de Navarra. Departamento de Físicaes_ES
dc.contributor.departmentNafarroako Unibertsitate Publikoa. Fisika Sailaeu
dc.rights.accessRightsAcceso abierto / Sarbide irekiaes
dc.rights.accessRightsinfo:eu-repo/semantics/openAccessen
dc.identifier.doi10.1116/1.4869302
dc.relation.publisherversionhttps://doi.org/10.1116/1.4869302
dc.type.versionVersión publicada / Argitaratu den bertsioaes
dc.type.versioninfo:eu-repo/semantics/publishedVersionen
dc.contributor.funderGobierno de Navarra / Nafarroako Gobernua: 1858/2012es


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