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Micro sized interdigital capacitor for gases detection based on graphene oxide coating
(Springer, 2023) Contribución a congreso / Biltzarrerako ekarpena,
A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition ...