Micro sized interdigital capacitor for gases detection based on graphene oxide coating
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2024-04-09
Date
2023Author
Version
Acceso embargado / Sarbidea bahitua dago
Type
Contribución a congreso / Biltzarrerako ekarpena
Version
Versión aceptada / Onetsi den bertsioa
Project Identifier
AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2019-106231RB-I00/ES/ 
AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2021-122613OB-100 AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PRE2020-091797 //PEJ2018-002958-P
AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2021-122613OB-100 AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PRE2020-091797 //PEJ2018-002958-P Impact
Abstract
A micro sized interdigital capacitor sensible to CO2 and NO is
studied in this work. The photolithography technique enables to obtain fingers
with dimensions of 10 × 500 µm and separated 7 µm between them. The
deposition of a film composed of graphene oxide particles as the dielectrics of
the capacitor allows to measure the gas concentration of CO2 and NO mixed
with N2. The sensors were char ...
[++]
Subject
Interdigital,
Gas sensor,
Graphene oxide,
Photolithography
Publisher
Springer
Published in
Sensing Technology: proceedings of ICST 2022: Springer; 2023. p.24-30 978-3-031-29871-4
Departament
Universidad Pública de Navarra/Nafarroako Unibertsitate Publikoa. Institute for Advanced Materials and Mathematics - INAMAT2 /
Universidad Pública de Navarra/Nafarroako Unibertsitate Publikoa. Institute of Smart Cities - ISC
Sponsorship
This research was funded Agencia Estatal de Investigación (PID2019-106231RB-I00 and PID2021-122613OB-100) the Ministry of Science, Innovation and Universities of Spain (PRE2020-091797 and PEJ2018-002958-P) and Institute of Smart Cities PhD Student grants.
