Micro sized interdigital capacitor for gases detection based on graphene oxide coating
Fecha
2023Autor
Versión
Acceso abierto / Sarbide irekia
Tipo
Contribución a congreso / Biltzarrerako ekarpena
Versión
Versión aceptada / Onetsi den bertsioa
Identificador del proyecto
AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2019-106231RB-I00/ES/
AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2021-122613OB-100 AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PRE2020-091797 //PEJ2018-002958-P
Impacto
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nodoi-noplumx
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Resumen
A micro sized interdigital capacitor sensible to CO2 and NO is
studied in this work. The photolithography technique enables to obtain fingers
with dimensions of 10 × 500 µm and separated 7 µm between them. The
deposition of a film composed of graphene oxide particles as the dielectrics of
the capacitor allows to measure the gas concentration of CO2 and NO mixed
with N2. The sensors were char ...
[++]
A micro sized interdigital capacitor sensible to CO2 and NO is
studied in this work. The photolithography technique enables to obtain fingers
with dimensions of 10 × 500 µm and separated 7 µm between them. The
deposition of a film composed of graphene oxide particles as the dielectrics of
the capacitor allows to measure the gas concentration of CO2 and NO mixed
with N2. The sensors were characterized in a gas chamber with a constant flow,
obtaining promising results in changes of capacitance at 100 Hz. The sensors
have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10-1 pF/ % v/v
for CO2 and R2=0.972 and 1.433·10-1 pF/ppb for NO. [--]
Materias
Interdigital,
Gas sensor,
Graphene oxide,
Photolithography
Editor
Springer
Publicado en
Sensing Technology: proceedings of ICST 2022: Springer; 2023. p.24-30 978-3-031-29871-4
Departamento
Universidad Pública de Navarra/Nafarroako Unibertsitate Publikoa. Institute for Advanced Materials and Mathematics - INAMAT2 /
Universidad Pública de Navarra/Nafarroako Unibertsitate Publikoa. Institute of Smart Cities - ISC
Entidades Financiadoras
This research was funded Agencia Estatal de Investigación (PID2019-106231RB-I00 and PID2021-122613OB-100) the Ministry of Science, Innovation and Universities of Spain (PRE2020-091797 and PEJ2018-002958-P) and Institute of Smart Cities PhD Student grants.