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dc.creatorVitoria Pascual, Ignacioes_ES
dc.creatorArmas, Dayrones_ES
dc.creatorCoronel Camones, Carlos Manueles_ES
dc.creatorAlgarra González, Manueles_ES
dc.creatorRuiz Zamarreño, Carloses_ES
dc.creatorMatías Maestro, Ignacioes_ES
dc.creatorMukhopadhyay, Subhas C.es_ES
dc.date.accessioned2023-05-31T11:19:06Z
dc.date.issued2023
dc.identifier.citationVitoria, I., Armas, D., Coronel, C., Algarra, M., Zamarreño, C. R., Matias, I. R., Mukhopadhyay, S. C. (2023) Micro sized interdigital capacitor for gases detection based on graphene oxide coating. En Suryadevara, N. K., Krishanthi, B. G., Jayasundera, P., Roy, J. K., Mukhopadhyay S. C. (Eds.), Sensing Technology: proceedings of ICST 2022 (pp. 24-30). Springeren
dc.identifier.isbn978-3-031-29871-4
dc.identifier.urihttps://hdl.handle.net/2454/45362
dc.description.abstractA micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10-1 pF/ % v/v for CO2 and R2=0.972 and 1.433·10-1 pF/ppb for NO.en
dc.description.sponsorshipThis research was funded Agencia Estatal de Investigación (PID2019-106231RB-I00 and PID2021-122613OB-100) the Ministry of Science, Innovation and Universities of Spain (PRE2020-091797 and PEJ2018-002958-P) and Institute of Smart Cities PhD Student grants.en
dc.format.mimetypeapplication/pdfen
dc.language.isoengen
dc.publisherSpringeren
dc.relation.ispartofSensing Technology: proceedings of ICST 2022: Springer; 2023. p.24-30 978-3-031-29871-4en
dc.rights© Springer Nature Publishing AGen
dc.subjectInterdigitalen
dc.subjectGas sensoren
dc.subjectGraphene oxideen
dc.subjectPhotolithographyen
dc.titleMicro sized interdigital capacitor for gases detection based on graphene oxide coatinges
dc.typeContribución a congreso / Biltzarrerako ekarpenaes
dc.typeinfo:eu-repo/semantics/conferenceObjecten
dc.date.updated2023-05-31T10:48:45Z
dc.contributor.departmentInstitute for Advanced Materials and Mathematics - INAMAT2en
dc.contributor.departmentInstitute of Smart Cities - ISCen
dc.rights.accessRightsAcceso embargado / Sarbidea bahitua dagoes
dc.rights.accessRightsinfo:eu-repo/semantics/embargoedAccessen
dc.embargo.lift2024-04-09
dc.embargo.terms2024-04-09
dc.relation.projectIDinfo:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2019-106231RB-I00/ES/en
dc.relation.projectIDinfo:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PID2021-122613OB-100en
dc.relation.projectIDinfo:eu-repo/grantAgreement/AEI/Plan Estatal de Investigación Científica y Técnica y de Innovación 2017-2020/PRE2020-091797en
dc.relation.projectIDinfo:eu-repo/grantAgreement///PEJ2018-002958-Pen
dc.type.versionVersión aceptada / Onetsi den bertsioaes
dc.type.versioninfo:eu-repo/semantics/acceptedVersionen


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