Listar Dpto. Ingeniería Eléctrica y Electrónica - Ingeniaritza Elektriko eta Elektronikoa Saila por tema "Single-side lithography"
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Vertically coupled microring resonators using one epitaxial growth step and single-side lithography
A new concept for the fabrication of integrated microring resonators, requiring only one single epitaxial growth and two single-side lithographic steps, is proposed in what is the simplest fabrication scheme for vertical ...