(Springer, 2023) Vitoria Pascual, Ignacio; Armas, Dayron; Coronel Camones, Carlos Manuel; Algarra González, Manuel; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Mukhopadhyay, Subhas C.; Institute for Advanced Materials and Mathematics - INAMAT2; Institute of Smart Cities - ISC
A micro sized interdigital capacitor sensible to CO2 and NO is
studied in this work. The photolithography technique enables to obtain fingers
with dimensions of 10 × 500 µm and separated 7 µm between them. The
deposition of a film composed of graphene oxide particles as the dielectrics of
the capacitor allows to measure the gas concentration of CO2 and NO mixed
with N2. The sensors were characterized in a gas chamber with a constant flow,
obtaining promising results in changes of capacitance at 100 Hz. The sensors
have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10-1 pF/ % v/v
for CO2 and R2=0.972 and 1.433·10-1 pF/ppb for NO.
