Publication:

Micro sized interdigital capacitor for gases detection based on graphene oxide coating

A micro sized interdigital capacitor sensible to CO2 and NO is studied in this work. The photolithography technique enables to obtain fingers with dimensions of 10 × 500 µm and separated 7 µm between them. The deposition of a film composed of graphene oxide particles as the dielectrics of the capacitor allows to measure the gas concentration of CO2 and NO mixed with N2. The sensors were characterized in a gas chamber with a constant flow, obtaining promising results in changes of capacitance at 100 Hz. The sensors have a good linearity and sensitivity with a R2 = 0.996 and 5.026·10-1 pF/ % v/v for CO2 and R2=0.972 and 1.433·10-1 pF/ppb for NO.