Matías Maestro, Ignacio
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Matías Maestro
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Ignacio
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Ingeniería Eléctrica, Electrónica y de Comunicación
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ISC. Institute of Smart Cities
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Publication Open Access Micro sized interdigital capacitor for humidity detection based on agarose coating(2021) Vitoria Pascual, Ignacio; Armas, Dayron; Coronel Camones, Carlos Manuel; Ozcariz Celaya, Aritz; Ruiz Zamarreño, Carlos; Matías Maestro, Ignacio; Ingeniería Eléctrica, Electrónica y de Comunicación; Institute of Smart Cities - ISC; Ingeniaritza Elektrikoa, Elektronikoaren eta Telekomunikazio IngeniaritzarenA micro sized interdigital capacitor has been proposed for the detection of relative humidity. The photolithography technique enables the fabrication of fingers with a size of 10x500 um. A thin film of agarose functionalizes the sensor for humidity sensing, which improves its performance by 155 times, obtaining a sensitivity of 32.98 pF/%RH.Publication Open Access Generation of lossy mode resonances in a broadband range with multilayer coated coverslips optimized for humidity sensing(Elsevier, 2020) Bohórquez Navarro, Dina Luz; Del Villar, Ignacio; Corres Sanz, Jesús María; Matías Maestro, Ignacio; Ingeniaritza Elektrikoa, Elektronikoaren eta Telekomunikazio Ingeniaritzaren; Institute of Smart Cities - ISC; Ingeniería Eléctrica, Electrónica y de Comunicación; Universidad Pública de Navarra / Nafarroako Unibertsitate PublikoaCoverslips deposited with a metallic oxide can be employed for generating lossy mode resonances by lateral incidence of light on the coverslip. Here it is demonstrated that with copper oxide the fading observed with other materials in the near infrared (NIR) wavelength range is avoided and LMRs can be obtained in a broadband range from 400 to 1700 nm, which permitted to observe the better performance in the NIR region compared to the visible region: the sensitivity to humidity is improved by more than a factor of two. However, copper oxide is not adequate for sensing humidity. The sensitivity of the device was optimized initially with a tin oxide coating and later with an additional layer of agarose, specifically adequate for the detection of humidity. The best performance was obtained with an agarose concentration 1% w/v, which permitted to observe a 10-fold sensitivity increase compared to the same device without agarose. This opens the path towards the development of environmental, chemical or biological sensors with an optimized sensitivity to a specific parameter to detect.