Micro sized interdigital capacitor for humidity detection based on agarose coating

A micro sized interdigital capacitor has been proposed for the detection of relative humidity. The photolithography technique enables the fabrication of fingers with a size of 10x500 um. A thin film of agarose functionalizes the sensor for humidity sensing, which improves its performance by 155 times, obtaining a sensitivity of 32.98 pF/%RH.