Publication:
Vertically coupled microring resonators using one epitaxial growth step and single-side lithography

Date

2015

Authors

García López, Óscar
Thourhout, Dries Van
Baets, Roel

Director

Publisher

Optical Society of America
Acceso abierto / Sarbide irekia
Artículo / Artikulua
Versión publicada / Argitaratu den bertsioa

Project identifier

MINECO//TEC2013-47264-C2-2-R/ES/recolecta

Abstract

A new concept for the fabrication of integrated microring resonators, requiring only one single epitaxial growth and two single-side lithographic steps, is proposed in what is the simplest fabrication scheme for vertical microrings published to date. The approach is based on two vertically stacked phase matched core layers. The effect of bus waveguide, coupling region and ring structure parameters is theoretically analyzed. Numerical calculations predict high performance devices with quality factors of over 10000. The scheme can feature both active and passive regions, allowing the fabrication of microring lasers.

Description

Keywords

Integrated microring resonators, Epitaxial growth, Single-side lithography

Department

Ingeniería Eléctrica y Electrónica / Ingeniaritza Elektrikoa eta Elektronikoa

Faculty/School

Degree

Doctorate program

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