Vertically coupled microring resonators using one epitaxial growth step and single-side lithography
Fecha
2015Autor
Versión
Acceso abierto / Sarbide irekia
Tipo
Artículo / Artikulua
Versión
Versión publicada / Argitaratu den bertsioa
Impacto
|
10.1364/OE.23.005317
Resumen
A new concept for the fabrication of integrated microring
resonators, requiring only one single epitaxial growth and two single-side
lithographic steps, is proposed in what is the simplest fabrication scheme
for vertical microrings published to date. The approach is based on two
vertically stacked phase matched core layers. The effect of bus waveguide,
coupling region and ring structure para ...
[++]
A new concept for the fabrication of integrated microring
resonators, requiring only one single epitaxial growth and two single-side
lithographic steps, is proposed in what is the simplest fabrication scheme
for vertical microrings published to date. The approach is based on two
vertically stacked phase matched core layers. The effect of bus waveguide,
coupling region and ring structure parameters is theoretically analyzed.
Numerical calculations predict high performance devices with quality
factors of over 10000. The scheme can feature both active and passive
regions, allowing the fabrication of microring lasers. [--]
Materias
Integrated microring resonators,
Epitaxial growth,
Single-side lithography
Editor
Optical Society of America
Publicado en
Optics Express, Vol. 23, Issue 4, pp. 5317-5326 (2015)
Departamento
Universidad Pública de Navarra. Departamento de Ingeniería Eléctrica y Electrónica /
Nafarroako Unibertsitate Publikoa. Ingeniaritza Elektrikoa eta Elektronikoa Saila
Versión del editor
Entidades Financiadoras
This research was supported by the Spanish Government project TEC2013-47264-C2-2-R and
FEDER funds.