Publication: Lossy mode resonance optical sensors based on indium-gallium-zinc oxide thin film
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ES/1PE/TEC2016-78047
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This work discusses an application of electrically conductive and optically transparent indium-gallium-zinc oxide (IGZO) thin films for fabrication of lossy mode resonance (LMR) based optical fiber refractometers. The films have been deposited on both 200 μm in diameter multimode fused silica fiber and D-shaped fiber structure. A sensitivity of 12,929 nm/RIU was obtained in the refractive index range between 1.39 and 1.42. In case of D-shaped fiber structure the effect of polishing depth on the LMR phenomenon has also been studied.
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