Planar-waveguide-lmr-based sensors: engineering the depth of characteristic curves

dc.contributor.authorShrivastav, Anand M.
dc.contributor.authorDel Villar, Ignacio
dc.contributor.authorAscorbe Muruzabal, Joaquín
dc.contributor.authorCorres Sanz, Jesús María
dc.contributor.authorMatías Maestro, Ignacio
dc.contributor.departmentIngeniería Eléctrica, Electrónica y de Comunicaciónes_ES
dc.contributor.departmentInstitute of Smart Cities - ISCen
dc.contributor.departmentIngeniaritza Elektrikoa, Elektronikoaren eta Telekomunikazio Ingeniaritzareneu
dc.date.accessioned2023-09-18T15:00:54Z
dc.date.available2023-09-18T15:00:54Z
dc.date.issued2023
dc.date.updated2023-09-18T14:35:04Z
dc.description.abstractLossy mode resonance (LMR)-based sensors have been proven as one of the exponentially growing research fields since the last decade. These sensors have demonstrated their capabilities in the detection of several physical, chemical, and biological entities, such as refractive index, humidity, gases, enzymes, etc. Conventionally, LMR-based sensors are developed using optical fiber as the sensing platform, but to increase the broad range of applications and better tenability, planar waveguide substrates for LMR realization have been introduced in the last few years. This provides a greater degree of freedom for the sensor design such as tunability in substrate thickness, material, and better surface immobilization. The current study focuses on evaluating the effect of substrate thickness on LMR-based optical sensors to achieve higher sensing performance. For experiments, 150-μm-thick glass coverslips are used as the thin planer substrate, which is then coated with a few nanometers thick LMR-supported SnO 2 layer using the dc sputtering method. Furthermore, to monitor the effect of the changing substrate thickness, the width of the glass coverslip is reduced through the chemical etching process using the 40% HF solution, and simultaneously, the changes in LMR spectra are analyzed. The study shows that the depth of LMR curves strongly depend on the thickness of the waveguide providing LMRs with lower substrate thickness possesses higher depth. Greater depth in LMR curves is a crucial factor in identifying the minimum transmission wavelength of resonance, making it easier to track and detect the targeted parameter. This characteristic greatly enhances the applicability of LMR-based sensors in industrial applications.en
dc.description.sponsorshipThis work was supported in part by the European Union's Horizon 2020 Research and Innovation Programme under the Marie Skłodowska-Curie Grant 101034288 and in part by Campus Iberus Universities.en
dc.format.mimetypeapplication/pdfen
dc.identifier.citationShrivastav, A. M., Del Villar, I., Ascorbe, J., Corres, J. M., Matias, I. R. (2023) Planar-waveguide-lmr-based sensors: engineering the depth of characteristic curves. IEEE Sensors Letters, 7(8), 1-4. https://doi.org/10.1109/LSENS.2023.3297314.en
dc.identifier.doi10.1109/LSENS.2023.3297314
dc.identifier.issn2475-1472
dc.identifier.urihttps://academica-e.unavarra.es/handle/2454/46352
dc.language.isoengen
dc.publisherIEEEen
dc.relation.ispartofIEEE Sensors Letters, 7(8), 2023en
dc.relation.projectIDinfo:eu-repo/grantAgreement/European Commission/Horizon 2020 Framework Programme/101034288/
dc.relation.publisherversionhttps://doi.org/10.1109/LSENS.2023.3297314
dc.rights© 2023 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other work.en
dc.rights.accessRightsinfo:eu-repo/semantics/openAccess
dc.subjectSensor integrationen
dc.subjectLossy mode resonance (LMR)en
dc.subjectFull-width half-minimum (FWHM)en
dc.subjectOptical sensorsen
dc.subjectWaveguideen
dc.titlePlanar-waveguide-lmr-based sensors: engineering the depth of characteristic curvesen
dc.typeinfo:eu-repo/semantics/article
dc.type.versioninfo:eu-repo/semantics/acceptedVersion
dspace.entity.typePublication
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relation.isAuthorOfPublication.latestForDiscovery4af62af3-50fe-47ee-a17c-bd4ffb52ebe3

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