HMR-based optical gas detection with CuO and ZnO coatings

This work presents the fabrication of hyperbolic mode resonance-based optical sensors by means of sputtered copper oxide (CuO) and zinc oxide (ZnO), and the study of their performance for gas sensing purposes. Two sensors were fabricated in a planar waveguide configuration with an intermediate gold thin film, and resonances were observed in the visible region of the electromagnetic spectrum. Both materials were analyzed with X-ray diffraction techniques, and their response was characterized by different concentrations of a group of gases comprised of nitric oxide, acetylene (C2H2), ethanol, carbon dioxide, and relative humidity. The best performance corresponds to the CuO sensor for C2H2 gas, presenting a sensitivity of 1.11 nm/parts per million (ppm) and a limit of detection of 12.6 ppb, with response and recovery times of 70 and 68 s, respectively. ZnO-based sensors allowed for a comprehensive study of ethanol in a range of thousands of ppm, while CuO-based sensors showed exceptional sensitivity for most gases in the range of a few ppm. All measurements were performed at room temperature.