Publication: Generation of surface plasmon resonance and lossy mode resonance by thermal treatment of ITO thin-films
Date
2014
Director
Publisher
Elsevier
Acceso abierto / Sarbide irekia
Artículo / Artikulua
Versión aceptada / Onetsi den bertsioa
Project identifier
MINECO//TEC2013-43679-R/ES/
Abstract
Silicon wafers coated with IndiumTinOxide (ITO) by application of sputtering technique have been characterized after different post-annealing techniques, showing that this last factor is critical for the quality of the thin-film and for the creation and tuning of both surface plasmon resonances and lossy mode resonances. By adequate selection of the ITO thin-film thickness both resonances can be tracked in the same spectrum, which can be used in sensor and optical communications fields.
Description
Keywords
Thin films, Optical resonance, Sensors
Department
Ingeniería Eléctrica y Electrónica / Ingeniaritza Elektrikoa eta Elektronikoa
Faculty/School
Degree
Doctorate program
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© 2014 Elsevier B.V. The manuscript version is made available under the CC BY-NC-ND 4.0 license.
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